Helium behavior of tungsten investigated by helium ion microscope
نویسندگان
چکیده
منابع مشابه
Nanofabrication with a Helium Ion Microscope
The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe [1,2]. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well as a mechanism for very precise nanofabrication [...
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ژورنال
عنوان ژورنال: Acta Physica Sinica
سال: 2019
ISSN: 1000-3290
DOI: 10.7498/aps.68.20181864